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Rapid thermal processing science and technology by

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Published by Academic Press in Boston .
Written in English

Subjects:

  • Semiconductors -- Heat treatment.,
  • Semiconductor doping.,
  • Rapid thermal processing.

Book details:

Edition Notes

Includes bibliographical references and index.

Statementedited by Richard B. Fair.
ContributionsFair, Richard B.
Classifications
LC ClassificationsTK7871.85 .F299 1993
The Physical Object
Paginationviii, 430 p. :
Number of Pages430
ID Numbers
Open LibraryOL1399222M
ISBN 100122476905
LC Control Number93006882

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  This is the first definitive book on rapid thermal processing (RTP), an essential namufacturing technology for single-wafer processing in highly controlled environments. Written and edited by nine experts in the field, this book covers a range of topics for academics and engineers alike, moving from basic theory to advanced technology for wafer Format: Paperback. This volume is a collection of papers which were presented at the International Conference on Rapid Thermal Processing (RTP ) held at Ise Shima, Mie, on November , This symposium is second conference followed the previous successful first International RTP conference held at Hokkaido in   Rapid Thermal Processing: Science and Technology - Ebook written by Richard B. Fair. Read this book using Google Play Books app on your PC, android, iOS devices. Download for offline reading, highlight, bookmark or take notes while you read 1/5(1). Rapid Thermal Processing: Science and Technology - Kindle edition by Richard B. Fair. Download it once and read it on your Kindle device, PC, phones or tablets. Use features like bookmarks, note taking and highlighting while reading Rapid Thermal Processing: Science and Technology.

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  Rapid Thermal Processing (RTP) is a well established single-wafer technology in USLI semiconductor manufacturing and electrical engineering, as well as in materials science. The biggest advantage of RTP is that it eliminates the long-ramp-up and ramp-down times associated with furnaces, enabling a significant reduction in the thermal Edition: 1. This special-topic book, “Rapid Thermal Processing and Beyond: Applications in Semiconductor Processing” focuses on various aspects of Rapid Thermal and Millisecond Annealing and is arranged so as to follow the major processing steps involved in high-performance transistor fabrication, without claiming to be a complete catalogue of all of the Rapid Thermal Processing (RTP) steps. ISBN: OCLC Number: Description: viii, pages: illustrations ; 24 cm: Contents: 1. Rapid Thermal Processing --A Justification / Richard B. Fair Rapid Thermal Processing-Based Epitaxy / J.L. Hoyt Rapid Thermal Growth and Processing of Dielectrics / Hisham Z. Massoud Thin-Film Deposition / Mehmet C. Ozturk Get this from a library! Rapid Thermal Processing: Science and Technology.. [Richard B Fair] -- This is the first definitive book on rapid thermal processing (RTP), an essential namufacturing technology for single-wafer processing in highly controlled environments. Written and edited by nine.